000			02994nam a2200361 i 4500
001			CR9781139032605
003			UkCbUP
005			20230516164938.0
006			m|||||o||d||||||||
007			cr||||||||||||
008			110225s2013||||enk o ||1 0|eng|d
020			_a9781139032605 (ebook)
020			_z9780521764834 (hardback)
040			_aUkCbUP _beng _erda _cUkCbUP
050	0	0	_aTK7875 _b.J66 2013
082	0	0	_a621.381 _223
100	1		_aJones, T. B. _q(Thomas Byron), _d1944- _eauthor. _968404
245	1	0	_aElectromechanics and MEMS / _cThomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology.
246	3		_aElectromechanics & MEMS
264		1	_aCambridge : _bCambridge University Press, _c2013.
300			_a1 online resource (xx, 559 pages) : _bdigital, PDF file(s).
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
500			_aTitle from publisher's bibliographic system (viewed on 05 Oct 2015).
505	8		_aMachine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS.
520			_aOffering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.
650		0	_aMicroelectromechanical systems. _96063
700	1		_aNenadic, Nenad G., _eauthor. _968405
776	0	8	_iPrint version: _z9780521764834
856	4	0	_uhttps://doi.org/10.1017/CBO9781139032605
942			_cEBK
999			_c82370 _d82370