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001 | 9783110487473 | ||
003 | DE-B1597 | ||
005 | 20240730161918.0 | ||
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007 | cr || |||||||| | ||
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020 | _a9783110487473 | ||
024 | 7 |
_a10.1515/9783110487473 _2doi |
|
035 | _a(DE-B1597)468725 | ||
035 | _a(OCoLC)1059296326 | ||
040 |
_aDE-B1597 _beng _cDE-B1597 _erda |
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041 | 0 | _aeng | |
044 |
_agw _cDE |
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050 | 0 | 0 |
_aTK7871.85 _b.Z43 2018 |
050 | 4 |
_aTK7871.85 _b.Z43 2018 |
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072 | 7 |
_aTEC020000 _2bisacsh |
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082 | 0 | 4 |
_a621.39/5 _223 |
100 | 1 |
_aZhang, Jie, _eauthor. _4aut _4http://id.loc.gov/vocabulary/relators/aut _978386 |
|
245 | 1 | 0 |
_aWafer Fabrication : _bAutomatic Material Handling System / _cJie Zhang. |
264 | 1 |
_aBerlin ; _aBoston : _bDe Gruyter, _c[2018] |
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264 | 4 | _c©2018 | |
300 | _a1 online resource (XII, 272 p.) | ||
336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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_atext file _bPDF _2rda |
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505 | 0 | 0 |
_tFrontmatter -- _tPreface -- _tContents -- _t1 Semiconductor wafer fabrication system -- _t2 Automated material handling systems in SWFSs -- _t3 Modeling methods of automated material handling systems in SWFSs -- _t4 Analysis of automated material handling systems in SWFSs -- _t5 Scheduling methods of automated material handling systems in SWFSs -- _t6 Scheduling in Interbay automated material handling systems -- _t7 Scheduling in Intrabay automatic material handling systems -- _t8 Integrated scheduling in AMHSs -- _t9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- _tIndex |
506 | 0 |
_arestricted access _uhttp://purl.org/coar/access_right/c_16ec _fonline access with authorization _2star |
|
520 | _aThis book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. | ||
538 | _aMode of access: Internet via World Wide Web. | ||
546 | _aIn English. | ||
588 | 0 | _aDescription based on online resource; title from PDF title page (publisher's Web site, viewed 30. Aug 2021) | |
650 | 0 |
_aManufacturing processes _xAutomatic control. _978387 |
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650 | 0 |
_aSemiconductor wafers _xAutomatic control. _978388 |
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650 | 7 |
_aTechnology & Engineering / Manufacturing. _2bisacsh _978389 |
|
700 | 1 |
_aHuazhong University of Science and Technology,. _978390 |
|
773 | 0 | 8 |
_iTitle is part of eBook package: _dDe Gruyter _tDG Plus eBook-Package 2018 _z9783110719550 |
773 | 0 | 8 |
_iTitle is part of eBook package: _dDe Gruyter _tEBOOK PACKAGE COMPLETE 2018 English _z9783110604252 |
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_iTitle is part of eBook package: _dDe Gruyter _tEBOOK PACKAGE COMPLETE 2018 _z9783110603255 _oZDB-23-DGG |
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_iTitle is part of eBook package: _dDe Gruyter _tEBOOK PACKAGE Engineering, Computer Sciences 2018 English _z9783110604023 |
773 | 0 | 8 |
_iTitle is part of eBook package: _dDe Gruyter _tEBOOK PACKAGE Engineering, Computer Sciences 2018 _z9783110603118 _oZDB-23-DEI |
776 | 0 |
_cEPUB _z9783110487237 |
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776 | 0 |
_cprint _z9783110486902 |
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856 | 4 | 0 | _uhttps://doi.org/10.1515/9783110487473 |
856 | 4 | 0 | _uhttps://www.degruyter.com/isbn/9783110487473 |
856 | 4 | 2 |
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