| 000 | 00419nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 190706s9999 xx 000 0 und d | ||
| 020 | _a0-8155-1442-5 | ||
| 082 | _a621.38172 S493 | ||
| 100 | _aSESHAN, K. | ||
| 245 | 0 | _aHANDBOOK OF THIN- FILM DEPOSITION PROCESSES AND TECHNIQUES:PRINCIPLES,METHODS,EQ | |
| 250 | _a2 | ||
| 260 |
_aNEW YORK _bNoyes Data Corp _c2002 |
||
| 300 | _axxviii+629p.,23x15Cm | ||
| 942 |
_cREF _2DDC |
||
| 999 |
_c8563 _d8563 |
||