000 00376nam a2200145Ia 4500
008 190706s9999 xx 000 0 und d
020 _a0-07-140214-4
082 _a621.381 H293
100 _aHARPER, C.A.
245 0 _aELECTRONIC MATERIALS AND PROCESS HANDBOOK
250 _a3
260 _aNEW YORK
_bMcGRAW HILL
_c2004
300 _axiii+692p.,24X19Cms.
942 _cREF
_2DDC
999 _c8600
_d8600