Wafer manufacturing : (Record no. 69442)

000 -LEADER
fixed length control field 01509cam a2200433Ki 4500
001 - CONTROL NUMBER
control field on1231983670
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20220711203637.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 210119s2014 enk o 000 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9781118696224
-- (electronic bk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 1118696220
-- (electronic bk.)
029 1# - (OCLC)
OCLC library identifier AU@
System control number 000068659406
082 04 - CLASSIFICATION NUMBER
Call Number 621.38152
100 1# - AUTHOR NAME
Author Cao, Imin,
245 10 - TITLE STATEMENT
Title Wafer manufacturing :
Sub Title shaping of single crystal silicon wafers /
300 ## - PHYSICAL DESCRIPTION
Number of Pages 1 online resource.
700 1# - AUTHOR 2
Author 2 Bhagavat, Milind,
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier https://doi.org/10.1002/9781118696224
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type eBooks
264 #1 -
-- Chichester :
-- Wiley-Blackwell,
-- 2014.
336 ## -
-- text
-- txt
-- rdacontent
337 ## -
-- computer
-- c
-- rdamedia
338 ## -
-- online resource
-- cr
-- rdacarrier
588 0# -
-- Print version record.
650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Semiconductor wafers.
650 #7 - SUBJECT ADDED ENTRY--SUBJECT 1
-- Semiconductor wafers.
-- (OCoLC)fst01112189
994 ## -
-- 92
-- DG1

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