Wafer manufacturing : shaping of single crystal silicon wafers / by Imin Cao, Milind Bhagavat.
By: Cao, Imin [author.]
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Contributor(s): Bhagavat, Milind [author.].
Material type: 
BookPublisher: Chichester : Wiley-Blackwell, 2014Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781118696224; 1118696220.Subject(s): Semiconductor wafers | Semiconductor wafersGenre/Form: Electronic books.Additional physical formats: Print version:: Wafer manufacturing.DDC classification: 621.38152 Online resources: Wiley Online Library
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Wiley Frontlist Obook All English 2021
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