Particle control for semiconductor manufacturing / (Record no. 69794)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01608cam a2200469Mi 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9780203744307 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220711211859.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180517s2018 enk o 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781351425742 |
| -- | (ePub ebook) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 1351425749 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781351425759 |
| -- | (PDF ebook) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 1351425757 |
| -- | (PDF ebook) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781351425735 |
| -- | (Mobipocket ebook) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 1351425730 |
| -- | (Mobipocket ebook) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780203744307 |
| -- | (ebook) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0203744306 |
| -- | (ebook) |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.38152 |
| 100 0# - AUTHOR NAME | |
| Author | Donovan, |
| 245 10 - TITLE STATEMENT | |
| Title | Particle control for semiconductor manufacturing / |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 1st |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Design and construction. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Defects. |
| 700 1# - AUTHOR 2 | |
| Author 2 | Donovan, R. P., |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://www.taylorfrancis.com/books/9780203744307 |
| 856 42 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | London : |
| -- | Routledge, |
| -- | 2018. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 588 ## - | |
| -- | OCLC-licensed vendor bibliographic record. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Semiconductors |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Semiconductors |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Particles. |
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