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Particle control for semiconductor manufacturing / edited by R.P. Donovan.

By: Donovan [author.].

Contributor(s): Donovan, R. P [editor.].

Material type: materialTypeLabel

BookPublisher: London : Routledge, 2018Edition: 1st.Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9781351425742; 1351425749; 9781351425759; 1351425757; 9781351425735; 1351425730; 9780203744307; 0203744306.Subject(s): Semiconductors -- Design and construction

| Semiconductors -- Defects

| Particles

DDC classification: 621.38152 Online resources: Taylor & Francis | OCLC metadata license agreement

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