Materials processing by cluster ion beams : (Record no. 71117)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01534cam a2200313Ii 4500 |
| 001 - CONTROL NUMBER | |
| control field | 9780429194573 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 180331t20162016fluacd ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780429194573 |
| -- | (e-book : PDF) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781498733878 |
| -- | (e-book) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| -- | (hardback) |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 541.224 |
| -- | Y192 |
| 100 1# - AUTHOR NAME | |
| Author | Yamada, I. |
| 245 10 - TITLE STATEMENT | |
| Title | Materials processing by cluster ion beams : |
| Sub Title | history, technology, and applications / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | chapter 1. Ion beam technology : overview and history -- chapter 2. History and milestones of cluster beam development -- chapter 3. Development of cluster beam sources for solid materials -- chapter 4. Gas cluster ion beam equipment -- chapter 5. Cluster ion-solid surface interaction kinetics -- chapter 6. Cluster ion beam sputtering -- chapter 7. Cluster ion implantation -- chapter 8. Cluster ion beam-assisted deposition -- chapter 9. Applications -- chapter 10. Conclusions. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://www.taylorfrancis.com/books/9781498711760 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Boca Raton, Florida : |
| -- | CRC Press, |
| -- | [2016] |
| 264 #4 - | |
| -- | ©2016 |
| 336 ## - | |
| -- | text |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | rdacarrier |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Complex ions. |
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