Materials processing by cluster ion beams : history, technology, and applications / Isao Yamada.
By: Yamada, I. (Isao) [author.]
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Material type: 
BookPublisher: Boca Raton, Florida : CRC Press, [2016]Copyright date: ©2016Description: 1 online resource.Content type: text Media type: computer Carrier type: online resourceISBN: 9780429194573; 9781498733878.Subject(s): Complex ionsAdditional physical formats: Print version: : No titleDDC classification: 541.224 Online resources: Click here to view.
Contents:
chapter 1. Ion beam technology : overview and history -- chapter 2. History and milestones of cluster beam development -- chapter 3. Development of cluster beam sources for solid materials -- chapter 4. Gas cluster ion beam equipment -- chapter 5. Cluster ion-solid surface interaction kinetics -- chapter 6. Cluster ion beam sputtering -- chapter 7. Cluster ion implantation -- chapter 8. Cluster ion beam-assisted deposition -- chapter 9. Applications -- chapter 10. Conclusions.
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chapter 1. Ion beam technology : overview and history -- chapter 2. History and milestones of cluster beam development -- chapter 3. Development of cluster beam sources for solid materials -- chapter 4. Gas cluster ion beam equipment -- chapter 5. Cluster ion-solid surface interaction kinetics -- chapter 6. Cluster ion beam sputtering -- chapter 7. Cluster ion implantation -- chapter 8. Cluster ion beam-assisted deposition -- chapter 9. Applications -- chapter 10. Conclusions.
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