Lill, Thorsten,
Atomic layer processing : semiconductor dry etching technology / Thorsten Lill. - 1 online resource.
Includes bibliographical references and index.
Introduction -- Fundamentals -- Thermal Etching -- Thermal Isotropic ALE -- Radical Etching -- Directional ALE -- Reactive Ion Etching -- Ion Beam Etching -- Etching Species Generation -- Emerging Etching Technologies.
9783527824199 3527824197 9783527824182 3527824189
10.1002/9783527824199 doi
Semiconductors--Etching.
Electronic books.
TK7871.85
621.3815/2
Atomic layer processing : semiconductor dry etching technology / Thorsten Lill. - 1 online resource.
Includes bibliographical references and index.
Introduction -- Fundamentals -- Thermal Etching -- Thermal Isotropic ALE -- Radical Etching -- Directional ALE -- Reactive Ion Etching -- Ion Beam Etching -- Etching Species Generation -- Emerging Etching Technologies.
9783527824199 3527824197 9783527824182 3527824189
10.1002/9783527824199 doi
Semiconductors--Etching.
Electronic books.
TK7871.85
621.3815/2