Atomic layer processing : (Record no. 69538)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01888cam a2200481Ii 4500 |
| 001 - CONTROL NUMBER | |
| control field | on1249564453 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20220711203658.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 210504s2021 gw ob 001 0 eng d |
| 019 ## - | |
| -- | 1243743465 |
| -- | 1245420582 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783527824199 |
| -- | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 3527824197 |
| -- | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783527824182 |
| -- | (electronic bk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 3527824189 |
| -- | (electronic bk.) |
| 029 1# - (OCLC) | |
| OCLC library identifier | AU@ |
| System control number | 000069150886 |
| 082 04 - CLASSIFICATION NUMBER | |
| Call Number | 621.3815/2 |
| 100 1# - AUTHOR NAME | |
| Author | Lill, Thorsten, |
| 245 10 - TITLE STATEMENT | |
| Title | Atomic layer processing : |
| Sub Title | semiconductor dry etching technology / |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 online resource. |
| 505 0# - FORMATTED CONTENTS NOTE | |
| Remark 2 | Introduction -- Fundamentals -- Thermal Etching -- Thermal Isotropic ALE -- Radical Etching -- Directional ALE -- Reactive Ion Etching -- Ion Beam Etching -- Etching Species Generation -- Emerging Etching Technologies. |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| General subdivision | Etching. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | https://doi.org/10.1002/9783527824199 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | eBooks |
| 264 #1 - | |
| -- | Weinheim, Germany : |
| -- | Wiley-VCH, |
| -- | 2021. |
| 336 ## - | |
| -- | text |
| -- | txt |
| -- | rdacontent |
| 337 ## - | |
| -- | computer |
| -- | c |
| -- | rdamedia |
| 338 ## - | |
| -- | online resource |
| -- | cr |
| -- | rdacarrier |
| 588 0# - | |
| -- | Online resource; title from PDF title page (John Wiley, viewed May 4, 2021). |
| 650 #0 - SUBJECT ADDED ENTRY--SUBJECT 1 | |
| -- | Semiconductors |
| 994 ## - | |
| -- | 92 |
| -- | DG1 |
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